Media type: Microfiche; Thesis Title: Integriertes magnetisches Lagerungs- und Antriebssystem für Halbleiterwafer Contributor: Schneeberger, Thomas Christian [Author] imprint: 2008 Mikrofiche-Ausg. Extent: 139 S. Language: German RVK notation: ZN 4100 : Allgemeines Keywords: Hochschulschrift Type of reproduction: Mikrofiche-Ausg. Origination: University thesis: Zürich, Techn. Hochsch., Diss., 2008 Footnote:
Central Library – stack Shelf-mark: 2010 8 025815 Item ID: 32985662 Notizen: 2 Mikrofiches Status: Place order for use in library, interlibrary loan possible > Ordering possible ‒ please log in Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.