Media type: Book; Thesis Title: Design and realization of novel tools for soft lithography Contributor: Fakhr, Omar Diaa Mohamed Maged [Author] imprint: 2011 Extent: 135 S.; Ill., graph. Darst Language: English RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Hochschulschrift Origination: University thesis: München, Techn. Univ., Diss., 2011 Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 F176 Item ID: 32041618 Status: Loanable