Media type: Book; Thesis Title: Kapazitive Feuchtesensoren in Tantal-Dünnschichttechnik Contributor: Borgwardt, Christian [Author] Published: Düsseldorf: VDI-Verl., 1988 Published in: Verein Deutscher Ingenieure: Fortschritt-Berichte VDI ; 16300 Extent: 152 S.; zahlr. Ill. u. graph. Darst; 21 cm Language: German ISBN: 3181463086 Keywords: Feuchtigkeitssensor > Kapazitiver Sensor > Dünnschichtsensor > Tantal Feuchtigkeitsmessung > Mikrosensor Origination: University thesis: Zugl.: Stuttgart, Univ., Diss., 1988 Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZQ 1701-163 Item ID: 10361846 Status: Loanable
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