Media type: Book; Conference Proceedings Title: Digest of technical papers / 1995 Symposium on VLSI Technology : June 6 - 8, 1995, Kyoto Corporation: Ōyō-Butsuri-Gakkai imprint: Piscataway, NJ: IEEE Service Center, 1995 Extent: XV, 149 S.; Ill., graph. Darst Language: English ISBN: 0780326024; 0780326032; 0780326040 RVK notation: ZN 4100 : Allgemeines Keywords: VLSI > Fertigung Halbleitertechnologie Origination: Footnote:
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