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Hoßbach, Christoph [Author]

Entwicklung von Verfahren zur Atomlagenabscheidung von leitfähigen Tantalnitrid-basierten Dünnschichten

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  • Media type: Book; Thesis
  • Title: Entwicklung von Verfahren zur Atomlagenabscheidung von leitfähigen Tantalnitrid-basierten Dünnschichten
  • Contributor: Hoßbach, Christoph [Author]
  • Published: Hamburg: tredition, 2013
  • Extent: II, 154 S.; Ill., graph. Darst
  • Language: German
  • ISBN: 9783849574468; 3849574466
  • RVK notation: ZN 4150 : Dünnschichttechnologie
  • Keywords: Hochschulschrift
  • Origination:
  • University thesis: Zugl.: Dresden, Techn. Univ., Fak. Elektrotechnik und Informationstechnik, Diss., 2013
  • Footnote:

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Departmental Library DrePunct – open access area

  • Status: Loanable

Central Library – stack

  • Shelf-mark: 2014 8 016608
  • Item ID: 34115443
  • Status: Loanable, place order
Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.

Departmental Library DrePunct – stack

  • Shelf-mark: 2014 8 016609
  • Item ID: 34115445
  • Status: Place order for use in library, no dispatch by interlibrary loan; delivery of photocopies possible
Delivery expected: 1 - 2 days after order