McKerrow, Andrew J.
[Other]
;
Symposium Materials, Technology and Reliability for Advanced Interconnects and Low k Dielectrics 2003 San Francisco, Calif
Materials, technology and reliability for advanced interconnects and low-k dielectrics
: symposium held April 21 - 25, 2003, San Francisco, California, U.S.A. ; [Symposium E, held at the 2003 MRS spring meeting]
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Media type:
Book;
Conference Proceedings
Title:
Materials, technology and reliability for advanced interconnects and low-k dielectrics
:
symposium held April 21 - 25, 2003, San Francisco, California, U.S.A. ; [Symposium E, held at the 2003 MRS spring meeting]