Media type: Book Title: The physics of microfabrication Contributor: Brodie, Ivor [Author]; Muray, Julius J. [Author] imprint: New York [u.a.]: Plenum Press, 1983 Issue: 2. print. Extent: XIX, 503 S.; graph. Darst Language: Not determined ISBN: 0306408635 RVK notation: ZN 4150 : Dünnschichttechnologie Keywords: Integrierte Schaltung > Technologie Mikroelektronik > Technologie Origination: Footnote: Includes index
Departmental Library DrePunct – stack Shelf-mark: 0986 00314 001 Item ID: 10069571 Status: Loanable, place order > Ordering possible ‒ please log in