Media type: Book Title: MEMS and NEMS : systems, devices, and structures Contributor: Lyshevski, Sergey Edward [Author] imprint: Boca Raton, FL: CRC Press, 2002 Published in: Nano- and microscience, engineering, technology, and medicine series Extent: 442 S.; Ill., graph. Darst Language: English ISBN: 0849312620 RVK notation: ZN 3700 : Mikromechanik (hier auch Nanotechnologie) Keywords: Nanotechnologie Mikromechanik > Mikroelektronik Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 3700 L993 Item ID: 30920155 Status: Loanable