Media type: Book; Thesis Title: Innentrennschleifen von einkristallinem Silizium Contributor: Struth, Werner F. [Author] imprint: 1988 Extent: VIII, 145 S.; Ill., graph. Darst; 21 cm Language: German Keywords: Silicium > Einkristall > Trennschleifen Origination: University thesis: Aachen, Techn. Hochsch., Diss. : 1988 Footnote:
Departmental Library DrePunct – stack Shelf-mark: 0989 00669 001 Item ID: 31128630 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order