Media type: Book Title: PVD for microelectronics : sputter deposition applied to semiconductor manufacturing Contributor: Powell, Ronald A. [Author]; Rossnagel, Stephen M. [Author] imprint: San Diego [u.a.]: Academic Pr., 1999 Published in: Thin films ; 26 Extent: XIII, 419 S.; Ill., graph. Darst Language: English ISBN: 012533026X RVK notation: ZN 4150 : Dünnschichttechnologie Keywords: PVD-Verfahren Dünnschichttechnik Origination: Footnote: Includes index
Departmental Library DrePunct – open access area Shelf-mark: ZN 4150 P885 Item ID: 10364196 Status: Loanable
Central Library – open access area Shelf-mark: UA 8440-26 Item ID: 10284585 Status: To be used in the library, interlibrary loan possible