Media type: E-Book Title: Laser cleaning of silicon wafers : mechanisms and efficiencies Contributor: Mosbacher, Mario [Other]; Bertsch, Micha [Other]; Münzer, Hans-Joachim [Other]; Dobler, Volker [Other]; Runge, Bernd-Uwe [Other]; Bäuerle, Dieter [Other]; Boneberg, Johannes [Other]; Leiderer, Paul [Other] imprint: Konstanz: Bibliothek der Universität Konstanz, 2002 Extent: Online-Ressource Language: English Identifier: Origination: Footnote: Aus: Proc. of SPIE 4426 (2002). pp. 308-314 Access State: Open Access