Media type: E-Book; Thesis Title: Dynamic parameter identification techniques and test structures for microsystems characterization on wafer level Contributor: Shaporin, Alexey [Author] Published: Chemnitz: Universitätsverlag Chemnitz, 2009 Extent: Online-Ressource (29.54 MB) Language: English Identifier: RVK notation: ZQ 5072 : Parameteridentifikation ZN 3750 : Mikrosystemtechnik Keywords: Mikrosystemtechnik > Wafer > Layout > Parameteridentifikation > Eigenfrequenz > Toleranzanalyse Origination: University thesis: Zugl.: Chemnitz, Techn. Univ., Diss., 2009 Footnote: Access State: Open Access