Sommer, Daniel
[Author];
Brinkmann, Nils
[Author];
Micard, Gabriel
[Author];
Hahn, Giso
[Author];
Terheiden, Barbara
[Author]
Electrical, optical and structural investigation of low-temperature PECV-deposited hydrogenated amphorous silicon-oxynitride films for surface passivation of crystalline silicon solar cells
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Title:
Electrical, optical and structural investigation of low-temperature PECV-deposited hydrogenated amphorous silicon-oxynitride films for surface passivation of crystalline silicon solar cells