Media type: E-Book Title: Al 2 O 3/SiN x -stacks at increased temperatures : avoiding blistering during contact firing Contributor: Lüder, Thomas [Author]; Lauermann, Thomas [Author]; Zuschlag, Annika [Author]; Hahn, Giso [Author]; Terheiden, Barbara [Author] Published: Konstanz: Bibliothek der Universität Konstanz, 2012 Extent: 1 Online-Ressource Language: English Identifier: Origination: Footnote: Aus: Energy Procedia ; 27 (2012). - S. 426-431. - ISSN 1876-6102 Access State: Open Access