Media type: E-Book; Thesis Title: Mass selected low energy ion-assisted growth of epitaxial GaN thin films : impact of the nitrogen ion species Contributor: Mensing, Michael [VerfasserIn] Corporation: Universität Leipzig imprint: Leipzig, 2020 Extent: 1 Online-Ressource Language: English Identifier: RVK notation: UP 7570 : Halbleiter-Schichten Keywords: Hochschulschrift Origination: University thesis: Dissertation, Universität Leipzig, 2020 Footnote: Access State: Open Access