Media type: E-Book; Thesis Title: Investigations on reactively driven ion beam etching procedures for improvement of optical aluminium surfaces Contributor: Ulitschka, Melanie [Author]; Arnold, Thomas [Degree supervisor]; Lasagni, Andrés Fabián [Degree supervisor] Corporation: Technische Universität Dresden Published: Dresden, 2020 Extent: 1 Online-Ressource Language: English Identifier: RVK notation: ZM 7687 : Plasmaverfahren Keywords: Hochschulschrift Origination: University thesis: Dissertation, Technische Universität Dresden, 2020 Footnote: Information of inventory: Elektronischer Volltext - Zugang über WWW Access State: Open Access Rights information: Attribution (CC BY)