Media type: E-Book; Special Print Title: Fast in-situ tool inspection based on inverse fringe projection and compact sensor heads Published: Hannover: Gottfried Wilhelm Leibniz Universität Hannover, 2016 Hannover: Technische Informationsbibliothek (TIB), 2016 Published in: Proceedings of SPIE - The International Society for Optical Engineering ; 10023 (2016), 100230K Extent: 1 Online-Ressource Language: English DOI: 10.15488/1760 Identifier: Origination: Footnote: Access State: Open Access