Media type: E-Book; Thesis Title: Using grazing incidence small-angle X-ray scattering (GISAXS) for semiconductor nanometrology and defect quantification Contributor: Pflüger, Mika Hannes [VerfasserIn]; Busch, Kurt [AkademischeR BetreuerIn]; Richter, Mathias [AkademischeR BetreuerIn]; Okuda, Hiroshi [AkademischeR BetreuerIn] imprint: Berlin, 2020 Extent: 1 Online-Ressource Language: English DOI: 10.18452/22207 Identifier: Keywords: Hochschulschrift Origination: University thesis: Dissertation, Berlin, Humboldt-Universität zu Berlin, 2020 Footnote: Access State: Open Access