• Media type: E-Book; Special Print
  • Title: 3D direct laser writing of highly absorptive photoresist for miniature optical apertures
  • Contributor: Schmid, Michael D. [Author]; Toulouse, Andrea [Author]; Thiele, Simon [Author]; Mangold, Simon [Author]; Herkommer, Alois [Author]; Giessen, Harald [Author]
  • Published: [Weinheim]: Wiley-VCH GmbH, December 3, 2022
  • Published in: Advanced functional materials ; 33 (2023), 2211159
  • Extent: 1 Online-Ressource (8 Seiten); Illustrationen, Diagramme
  • Language: English
  • DOI: 10.18419/opus-13725
  • Identifier:
  • Origination:
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  • Access State: Open Access