Media type: E-Book Title: Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in RF-arc Discharge Contributor: Gornushkin, Igor [Author]; Kornev, R.A. [Author]; Shabarova, L.V. [Author]; Ermakov, A.A. [Author]; Mochalov, G.M. [Author]; Rekunov, N.V. [Author]; Medov, V.A. [Author]; Chaschina, A.D. [Author]; Kalinina, A.A. [Author] Published: Berlin: Bundesanstalt für Materialforschung und -prüfung (BAM), 2023 Extent: 1 Online-Ressource Language: English DOI: 10.20944/preprints202311.1412.v1 Identifier: Origination: Footnote: Access State: Open Access