Media type: Book Title: Handbook of sputter deposition technology : principles, technology and applications Contributor: Wasa, Kiyotaka [Author]; Hayakawa, Shigeru [Author] imprint: Park Ridge, N.J.: Noyes Publ., 1992 Published in: Materials science and process technology series Issue: Repr. ed. Extent: XII, 304 S; Ill., graph. Darst Language: English ISBN: 0815512805 RVK notation: UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik ZN 4150 : Dünnschichttechnologie ZM 7620 : Schutzschichten und Überzüge allgemein, Beschichten Keywords: Sputtern Dünnschichttechnik Origination: Footnote: Literaturangaben
Departmental Library DrePunct – stack Shelf-mark: R2019 8 1341 Item ID: 10085763 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order