Media type: Book Title: Plasma etching : fundamentals and applications Contributor: Sugawara, Minoru [Author]; Stansfield, Barry L. [Other] imprint: Oxford [u.a.]: Oxford University Press, 1998 Published in: Series on semiconductor science and technology ; 7 Extent: VIII, 347 S; Ill., graph. Darst Language: English ISBN: 019856287X RVK notation: UP 7570 : Halbleiter-Schichten ZN 4150 : Dünnschichttechnologie Keywords: Plasmaätzen Plasmaätzen Origination: Footnote: Includes bibliographical references and index
Departmental Library DrePunct – open access area Shelf-mark: ZN 4150 S947 Item ID: 10364554 Status: Loanable