Media type: Electronic Journal Title: Journal of micromechanics and microengineering Other titles: Kurztitel: J. Micromech. Microeng. imprint: Bristol: Inst., 1991- Publication information: 1.1991 - Language: English ISSN: 1361-6439 Keywords: Zeitschrift Origination: Footnote: In SLUB collection 1.1991 - 1.1991 - 22.2012 Access State: Open Access