Media type: Book Title: Ion beam assisted film growth Contributor: Itō, Tadatsugu [Editor] Published: Amsterdam [u.a.]: Elsevier, 1989 Published in: Beam modification of materials ; 3 Extent: XVII, 439 S.; Ill., graph. Darst Language: English ISBN: 0444423664; 0444872809 RVK notation: UP 9350 : Ionenimplantation allgemein, Etching, Sputtering UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik Keywords: Schichtwachstum > Ionenstrahl Ionenstrahl > Dünnschichttechnik Dünnschichttechnik > Ionenstrahlbearbeitung Origination: Footnote:
Central Library – stack Shelf-mark: 89 8 00231 000 01 0 1 Item ID: 10216454 Status: Loanable, place order > Ordering possible ‒ please log in Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.