Media type: Book Title: Sub-half-micron lithography for ULSIs Contains: Literaturangaben Contributor: Suzuki, Katsumi [Hrsg.] imprint: Cambridge [u.a.]: Cambridge University Press, 2000 Issue: 1st publ Extent: XVII, 323 S; Ill., graph. Darst; 26 cm Language: English ISBN: 0521570808 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: ULSI > Lithografie Origination: Footnote: Includes bibliographical references
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 S968 Item ID: 10088171 Status: Loanable