Media type: Book Title: Ionized physical vapor deposition Contributor: Hopwood, Jeffrey A. [Hrsg.] imprint: San Diego, Calif. [u.a.]: Acad. Press, 2000 Published in: Thin films ; 27 Extent: XII, 253 S.; Ill., graph. Darst Language: English ISBN: 0125330278 RVK notation: UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik Keywords: Aufdampfen > PVD-Verfahren Origination: Footnote: Literaturangaben
Central Library – open access area Shelf-mark: UA 8440-27 Item ID: 30519063 Status: To be used in the library, interlibrary loan possible