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Nishi, Yoshio [Editor]

Handbook of semiconductor manufacturing technology

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  • Media type: Book
  • Title: Handbook of semiconductor manufacturing technology
  • Contains: Includes index
  • Contributor: Nishi, Yoshio [Hrsg.]
  • imprint: New York; Basel: Dekker, 2000
  • Extent: XIV, 1157 S; Ill., zahlr. graph. Darst
  • Language: English
  • ISBN: 0824787838
  • RVK notation: ZN 4100 : Allgemeines
  • Keywords: Halbleitertechnologie
  • Origination:
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Departmental Library DrePunct – open access area

  • Status: Loanable

Departmental Library DrePunct – stack

  • Shelf-mark: R2019 4 103
  • Item ID: 10087931
  • Status: Loanable, place order

Bestand der TU Dresden

  • Shelf-mark: 75.4.6843
  • Item ID: 10307920N