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Buchanan, D. A. [Editor]

Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ; [papers from Symposium T, "Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon and Related Structures" held at the 1999 MRS Fall Meeting]

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  • Media type: Book; Conference Proceedings
  • Title: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ; [papers from Symposium T, "Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon and Related Structures" held at the 1999 MRS Fall Meeting]
  • Contributor: Buchanan, D. A. [Hrsg.]
  • imprint: Warrendale, Pa.: Materials Research Society, 2000
  • Published in: Materials Research Society: Materials Research Society symposium proceedings ; 59200
  • Extent: XI, 386 S; Ill., graph. Darst
  • Language: English
  • ISBN: 1558995005
  • RVK notation: ZN 3490 : Dielektrika
  • Keywords: Siliciumdioxid > Dielektrische Schicht
  • Origination:
  • Footnote: Includes bibliographical references and index

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  • Status: Loanable