Media type: Book; Thesis Title: Galvanic etching of silicon : for fabrication of micromechanical structures Contributor: Ashruf, Colin [Author]; Ashruf, Colin Mohammed Amin [Other] imprint: Delft: Delft Univ. Press, 2000 Extent: VIII, 158 S; Ill., graph. Darst Language: English ISBN: 9040720010 RVK notation: ZN 4100 : Allgemeines Keywords: Silicium > Nassätzen Origination: University thesis: Zugl.: Delft, Techn. Univ., Diss., 2000 Footnote:
Departmental Library DrePunct – stack Shelf-mark: 2001 8 020531 001 Item ID: 10089737 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order