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Sobe, Udo [Author]

Anregung und Auswertung von resonanten mikromechanischen Strukturen mit elektrostatischem Antrieb und kapazitivem Detektor in Mikrosystemen

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  • Media type: Book; Thesis
  • Title: Anregung und Auswertung von resonanten mikromechanischen Strukturen mit elektrostatischem Antrieb und kapazitivem Detektor in Mikrosystemen
  • Contributor: Sobe, Udo [Author]
  • Published: Aachen: Shaker, 2004
  • Published in: Berichte aus der Elektrotechnik
  • Extent: XV, 176 S; Ill., graph. Darst; 24 cm
  • Language: German
  • ISBN: 3832225129
  • RVK notation: ZN 3700 : Mikromechanik (hier auch Nanotechnologie)
  • Keywords: Mikromechanik > Resonator > Aktor > Drehratensensor > Scanner > Spiegel
  • Origination:
  • University thesis: Zugl.: Dresden, Techn. Univ., Diss., 2003
  • Footnote:

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Departmental Library DrePunct – open access area

  • Status: Loanable

Central Library – stack

  • Shelf-mark: 2002 8 066539
  • Item ID: 31080501
  • Status: Loanable, place order
Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.

Departmental Library DrePunct – stack

  • Shelf-mark: 2002 8 066540
  • Item ID: 31080502
  • Status: Place order for use in library, no dispatch by interlibrary loan; delivery of photocopies possible
Delivery expected: 1 - 2 days after order