Media type: Book Title: Interlayer dielectrics for semiconductor technologies Contributor: Murarka, Shyam P. [Author]; Murarka, S. P. [Other] imprint: Amsterdam; Heidelberg [u.a.]: Elsevier, c 2003 Extent: XIV, 444 S; graph. Darst Language: English ISBN: 0125112211 RVK notation: ZN 4800 : Allgemeines ZN 4100 : Allgemeines Keywords: Halbleiterbauelement > Halbleitertechnologie > Dielektrische Schicht Origination: Footnote: Literaturangaben
Departmental Library DrePunct – stack Shelf-mark: R2019 8 1343 Item ID: 30977984 Status: Loanable, place order > Ordering possible ‒ please log in