Media type: Book Title: Semiconductor manufacturing handbook : [wafer processing technologies ; nanotechnology and MEMs ; fab yield, operations, and facilities] Contributor: Geng, Hwaiyu [Author] imprint: New York, NY [u.a.]: McGraw-Hill, 2005 Published in: McGraw-Hill handbooks Extent: Getr. Zählung; Ill., graph. Darst; 24cm Language: English ISBN: 0071445595 Keywords: Halbleitertechnologie Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4100 G329 Item ID: 31499497 Status: Loanable