Media type: Book Title: Micro process engineering : fundamentals, devices, fabrication, and applications Contributor: Kockmann, Norbert [Editor] Published: Weinheim: Wiley-VCH, 2006 Published in: Advanced micro & nanosystems ; 5 Extent: XXII, 507 S.; Ill., graph. Darst; 25 cm Language: English ISBN: 3527312463; 9783527312467 Publisher, production or purchase order numbers: Sonstige Nummer: 1131246 000 RVK notation: VN 7000 : Allgemeines ZN 3750 : Mikrosystemtechnik VN 7300 : Allgemeines ZN 4980 : Mikrocontroller, Signalprozessoren Keywords: Chemische Verfahrenstechnik > Mikrosystemtechnik Mikrofluidik Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 3700 A244-5 Item ID: 31507621 Status: Loanable