Media type: Book Title: Fundamental principles of optical lithography : the science of microfabrication Contributor: Mack, Chris [Author]; Mack, Chris A. [Other] imprint: Chichester, West Sussex: Wiley, 2007 Extent: XVII, 515 S.; Ill., graph. Darst Language: English ISBN: 0470018933; 9780470018934; 9780470727300 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Lithografie > Fotolithografie Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 M153 Item ID: 31913839 Status: Loanable
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 M153 Item ID: 31916876 Status: Loanable