Media type: Book Title: Dielectric films for advanced microelectronics Contributor: Baklanov, Mikhail [Hrsg.] imprint: Chichester [u.a.]: Wiley, 2007 Published in: Wiley series in materials for electronic and optoelectronic applications Extent: XXII, 486 S.; Ill., graph. Darst Language: English ISBN: 0470013605; 9780470013601 RVK notation: ZN 3490 : Dielektrika Keywords: Dielektrische Schicht > Werkstoff > Mikroelektronik Origination: Footnote: Includes bibliographical references and index
Departmental Library DrePunct – open access area Shelf-mark: ZN 3490 B168 Item ID: 31732167 Status: Loanable