Media type: Book Title: Surfaces, interfaces, and thin films for microelectronics Contributor: Irene, Eugene A. [Author] Published: Hoboken, N.J: Wiley-Interscience, 2008 Extent: XIII, 515 S.; Ill., graph. Darst Language: English ISBN: 0470174471; 9780470174470 RVK notation: ZN 3400 : Allgemeines VE 7000 : Allgemeines Keywords: Oberfläche > Grenzfläche > Dünne Schicht > Mikroelektronik Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 3400 I66 S9 Item ID: 32026191 Status: Loanable