Media type: Book Title: Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies Contributor: Behrisch, Rainer [Hrsg.]; Eckstein, Wolfgang [Other]; Eckstein, Wolfgang [Hrsg.] imprint: Berlin; Heidelberg [u.a.]: Springer, 2007 Published in: Topics in applied physics ; 110 Extent: XVII, 507 S.; Ill., graph. Darst; 235 mm x 155 mm Language: English ISBN: 3540445005; 9783540445005 Publisher, production or purchase order numbers: Sonstige Nummer: 10989166 RVK notation: UP 9350 : Ionenimplantation allgemein, Etching, Sputtering UD 9450 : Topics in applied physics Keywords: Sputtern Origination: Footnote: Literaturangaben