• Media type: Book
  • Title: Multi-wafer rotating MEMS machines : turbines, generators, and engines
  • Contributor: Lang, Jeffrey H. [Hrsg.]
  • imprint: New York; Heidelberg [u.a.]: Springer, 2009
  • Published in: MEMS reference shelf
  • Extent: XV, 456 S; Ill., graph. Darst; 235 mm x 155 mm
  • Language: English
  • ISBN: 0387777466; 9780387777467
  • Publisher, production or purchase order numbers: Sonstige Nummer: 11939313
  • RVK notation: ZN 3750 : Mikrosystemtechnik
  • Keywords: Microelectromechanical systems ; Turbomachines ; Gas-turbines
  • Origination:
  • Footnote: Literaturangaben

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  • Status: Loanable