Media type: Book Title: Integrated interconnect technologies for 3D nanoelectronic systems Contains: Literaturangaben Contributor: Bakir, Muhannad S. [Hrsg.] imprint: Boston, Mass. [u.a.]: Artech House, 2009 Published in: Artech House Integrated microsystems series Extent: XX, 528 S.; Ill., graph. Darst Language: English ISBN: 9781596932463; 1596932465 RVK notation: ZN 3700 : Mikromechanik (hier auch Nanotechnologie) Keywords: Nanoelektronik > CMOS > Chip Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 3700 B168 Item ID: 32109069 Status: Loanable