Media type: Book Title: Nanoscale devices : fabrication, functionalization, and accessibility from the macroscopic world Contains: Literaturverz. S. 191 - 200 Contributor: Cerofolini, Gianfranco [Author] imprint: Dordrecht; Berlin; Heidelberg [u.a.]: Springer, 2009 Published in: Nanoscience and technology Extent: XVI, 205 S.; Ill., graph. Darst; 24cm Language: English ISBN: 354092731X; 9783540927310 RVK notation: ZN 3700 : Mikromechanik (hier auch Nanotechnologie) UX 2350 : Mikroelektronik Keywords: Nanotechnologie Nanolithografie Nanoelektronik Nanotechnologie Origination: Footnote: