Media type: E-Book; Thesis Title: An Investigation of Target Poisoning during Reactive Magnetron Sputtering Contributor: Güttler, Dominik [Author] imprint: 2008 [2009] Extent: Online-Ressource Language: English Identifier: RVK notation: UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik Keywords: Hochschulschrift Reproduction note: Online-Ausg Origination: University thesis: Dresden, Techn. Univ., Fak. Mathematik und Naturwiss., Diss., 2009 Footnote: Information of inventory: Elektronischer Volltext - Zugang über WWW Access State: Open Access Rights information: In Copyright