Media type: Book Title: Acoustic wave and electromechanical resonators : concept to key applications Contains: 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. Contributor: Campanella, Humberto [Author] imprint: Boston, Mass. [u.a.]: Artech House, 2010 Published in: Artech House integrated microsystems series Extent: XV, 345 S.; Ill., graph. Darst Language: English ISBN: 1607839776; 9781607839774 RVK notation: ZN 3750 : Mikrosystemtechnik Keywords: MEMS > Nanoelektromechanik > CMOS > Akustischer Resonator Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 3750 C186 Item ID: 32579292 Status: Loanable