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Liske, Romy [Author]

Die Kinetik der elektrochemischen Kupferabscheidung in Sub-100-nm-Strukturen

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  • Media type: Book; Thesis
  • Title: Die Kinetik der elektrochemischen Kupferabscheidung in Sub-100-nm-Strukturen
  • Contributor: Liske, Romy [Author]
  • imprint: Stuttgart: Fraunhofer-Verl., 2011
  • Extent: XIX, 105 S.; Ill., graph. Darst
  • Language: German
  • ISBN: 3839602823; 9783839602829
  • RVK notation: ZN 4154 : Herstellungsverfahren
  • Keywords: Leiterbahn > Kupfer > Galvanische Abscheidung > Nanoelektronik
  • Origination:
  • University thesis: Zugl.: Dresden, Techn. Univ., Fak. Elektrotechnik und Inforamtionstechnik, Diss., 2011
  • Footnote:

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Departmental Library DrePunct – open access area

  • Status: Loanable

Central Library – stack

  • Shelf-mark: 2011 8 039820
  • Item ID: 33140946
  • Status: Loanable, place order
Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.

Departmental Library DrePunct – stack

  • Shelf-mark: 2011 8 039821
  • Item ID: 33140947
  • Status: Place order for use in library, no dispatch by interlibrary loan; delivery of photocopies possible
Delivery expected: 1 - 2 days after order