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López Alonso, Elena [Author]

Plasmachemisches Trockenätzen von Solarwafern mit Atmosphärendruck-Plasmen - [1. Aufl.]

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  • Media type: Book; Thesis
  • Title: Plasmachemisches Trockenätzen von Solarwafern mit Atmosphärendruck-Plasmen
  • Contributor: López Alonso, Elena [Author]
  • imprint: Aachen: Shaker, 2014
  • Published in: Berichte aus der Fertigungstechnik
  • Issue: 1. Aufl.
  • Extent: 174 S.; 210 mm x 148 mm, 261 g
  • Language: German
  • ISBN: 9783844032178
  • RVK notation: ZL 7660 : Kältemittel
  • Keywords: Silicium > Wafer > Plasmaätzen > Atmosphärendruckplasma > Solarzelle > Herstellung
  • Origination:
  • University thesis: Zugl.: Dresden, Techn. Univ., Fak. Maschinenwesen, Diss., 2014
  • Footnote:

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Departmental Library DrePunct – open access area

  • Status: Loanable

Central Library – stack

  • Shelf-mark: 2015 8 002253
  • Item ID: 34117519
  • Status: Loanable, place order
Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.

Departmental Library DrePunct – stack

  • Shelf-mark: 2015 8 002254
  • Item ID: 34117520
  • Status: Place order for use in library, no dispatch by interlibrary loan; delivery of photocopies possible
Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.