Media type: E-Article Title: Thermal and mechanical modelling of gas sensing microsystem based on GaAs microstructures Contributor: Burian, Eduard [Other]; Hotovy, Ivan [Other]; Lalinsky, Tibor [Other]; Vano, Peter [Other] Published: 2005 2011 Published in: Maschinenbau von Makro bis Nano ; 2005, [04.P.05], insges. 2 S. Language: English Origination: Footnote: Access State: Open Access