Media type: E-Article Title: In-plane micro-motion characterization for MEMS/NEMS using machine vision with nano-resolution Contributor: Li, Dachao [Other]; Jin, Cuiyun [Other]; Feng, Yalin [Other]; Guo, Tong [Other]; Hu, Xiaodong [Other]; Chen, Jinping [Other]; Fu, Xing [Other]; Hu, Xiaotang [Other] imprint: 2005 2011 Published in: Maschinenbau von Makro bis Nano ; 2005, [04.P.13], insges. 2 S. Language: English Origination: Footnote: Access State: Open Access