Media type: E-Book; Conference Proceedings Title: 2016 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC) : 23-26 May 2016 Corporation: Institute of Electrical and Electronics Engineers Published: [Piscataway, NJ]: IEEE, 2016 Extent: 1 Online-Ressource; Illustrationen Language: English ISBN: 9781509003860; 1509003851; 150900386X; 1509003878; 9781509003853; 9781509003860; 9781509003877 Keywords: Integrierte Schaltung > Metallisierungsschicht Origination: Footnote: "San Jose, California" - Veranstaltungsort auf der IITC-Homepage