IEEE/SEMI International Semiconductor Manufacturing Science Symposium (1st :1989 :Burlingame, Calif.),
Institute of Electrical and Electronics Engineers,
Semiconductor Equipment and Materials Institute
IEEE/SEMI International Semiconductor Manufacturing Science Symposium
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Media type:
E-Book;
Conference Proceedings
Title:
IEEE/SEMI International Semiconductor Manufacturing Science Symposium
:
theme: "Semiconductor manufacturing" : May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA
Other titles:
Nebentitel: 1989 IEEE/SEMI International Semiconductor Manufacturing Science Symposium
Also known as: ISMSS 1989
Electronic reproduction has title: Semiconductor Manufacturing Science Symposium, 1989, ISMSS 1989, IEEE/SEMI International