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European Workshop: Materials for Advanced Metallization (1997 :Villard-de-Lans, France), France Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle, International Union for Vacuum Science, Technique and Applications, IEEE Electron Devices Society

MAM '97, abstracts booklet

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  • Media type: E-Book; Conference Proceedings
  • Title: MAM '97, abstracts booklet : European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997
  • Other titles: Nebentitel: Materials for advanced metallization
    Electronic reproduction has title: Materials for Advanced Metallization, 1997, MAM '97 abstracts booklet, European Workshop
  • Corporation: France, Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle ; International Union for Vacuum Science, Technique and Applications ; IEEE Electron Devices Society
  • imprint: Paris, France: Société française du vide, 2010
    [S.l.]: HathiTrust Digital Library
  • Extent: 1 Online-Ressource (221 pages); illustrations
  • Language: English
  • ISBN: 0780339762; 9780780339767
  • Keywords: Integrated circuits Very large scale integration Design and construction Congresses ; Semiconductor-metal boundaries Congresses ; Metallizing Congresses ; Konferenzschrift
  • Place of reproduction: [S.l.]: HathiTrust Digital Library
  • Reproduction note: Electronic reproduction
  • Origination:
  • Footnote: "Supplément à la revue no 283"--Cover
    "With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. page
    Includes bibliographical references and index
    Use copy Restrictions unspecified star MiAaHDL
    Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002