• Media type: Text; E-Article
  • Title: Space charge layer effects in silicon studied by in situ surface transport
  • Contributor: Edler, Frederik [Author]; Miccoli, Ilio [Author]; Pfnür, Herbert [Author]; Tegenkamp, Christoph [Author]
  • Published: Bristol : Institute of Physics Publishing, 2019
  • Published in: Journal of Physics Condensed Matter 31 (2019), Nr. 21
  • Issue: published Version
  • Language: English
  • DOI: https://doi.org/10.15488/10237; https://doi.org/10.1088/1361-648X/ab094e
  • ISSN: 0953-8984
  • Keywords: Forestry ; Electronic properties ; Silicon surfaces ; Silicon ; surface transport ; Electric space charge ; Schottky barrier diodes ; Silicon carbide ; High temperature treatments ; Low dimensional structure ; Submonolayer coverage ; Transport measurements ; Temperature dependent ; Space charge layers ; Doping (additives) ; space charge layer ; Crystal atomic structure ; silicon surface
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  • Description: Electronic properties of low dimensional structures on surfaces can be comprehensively explored by surface transport experiments. However, the surface sensitivity of this technique to atomic structures comes along with the control of bulk related electron paths and internal interfaces. Here we analyzed the role of Schottky-barriers and space charge layers for Si-surfaces. By means of a metal submonolayer coverage deposited on vicinal Si(1 1 1), we reliably accessed subsurface transport channels via angle- and temperature-dependent in situ transport measurements. In particular, high temperature treatments performed under ultra high vacuum conditions led to the formation of surface-near bulk defects, e.g. SiC-interstitials. Obviously, these defects act as p-type dopants and easily overcompensate lightly n-doped Si substrates.
  • Access State: Open Access
  • Rights information: Attribution (CC BY)